Robot Phoenix Lobster185Z340D-T2X0-C Wafer Robot
Lobster series 185Z340D-T2X0-C wafer handling robot is a two-armed wafer transfer robot with a rate payload of 2kg. Equipped with a high-tech wafer transfer system, it has extremely high accuracy, flexibility and safety.
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Features of Lobster185Z340D-T2X0-C Wafer Transfer Robot
- Two-armed; payload is 2kg;
- 4-degrees-of-freedom;
- Repositioning accuracy reaches Âą0.1mm;
- Cleanliness reaches Class100.
Specification of Lobster185Z340D-T2X0-C Wafer Transfer Robot
| Model | Lobster185Z340D-T2X0-C | |
| Type | Two-armed | |
| Applied Specification | ~300 | |
| Rated Payload | 2KG | |
| Degree of Freedom | 4 | |
| Range of Motion | Lifting Axis (Z) | 340mm |
| Rotating Axis (T) | 340deg | |
| Stretching Axis (R) | 360mm | |
| Maximum Speed | Lifting Axis (Z) | 400mm/s |
| Rotating Axis (T) | 260deg/sec | |
| Stretching Axis (R) | 1500mm/s | |
| Features | 1) Cleanroom environment. 2) Robotic Arm Length: 135mm; 185mm. 3) Two-armed structure shortens the operation time of wafer replacement. 4) Mapping Sensor to detect if wafers are there, if overlying or tilting. 5) Specifications can be customized according to requirements. | |
| Re-positioning Accuracy | Âą0.1mm | |
| Leak Rate | - | |
| Cleanliness | Class 100 | |
| Interface | I/O interface | 4 configurable digital inputs; 4 configurable digital outputs; 8 general digital inputs; 8 general digital outputs; (Re-extensible 8 digital inputs/outputs). |
| Ethernet | 1 | |
| USB | 2 | |
| RS232/RS485 | 1 | |
| Communication Protocol | Modbus-RTU/TCPãSocket | |
| Arm Length (R) | 185mm | |
| Vertical Stroke (Z) | 340mm | |
| Machine Table Height (H) | 605mm | |
| Actuator Length (L) | Demand-based | |
| Height from Table to Strokes Down Position (H) | 250mm | |
Robot
Wafer Handling Robot
Wafer Robot
Lobster185Z340D-T2X0-C Wafer Robot
Lobster185Z340D-T2X0-C
Robot Phoneix
Robot Phoenix Lobster185Z340D-T2X0-C Wafer Robot
Robot Phoenix Wafer Robot
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