Robot Phoenix Lobster200Z300S-T0X5-V Wafer Robot
Lobster series 200Z300S-T0X5-V wafer handling robot is a single-armed wafer transfer robot with advanced wafer handling equipment. It is a vaccum model with a rate payload of 0.5kg. It has extremely high accuracy, flexibility and safety.
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Features of Lobster200Z300S-T0X5-V Wafer Robot
- Single-armed; payload is 0.5kg;
- 3-degrees-of-freedom;
- Repositioning accuracy reaches ±0.1mm;
- Cleanliness reaches ISO Class1.
Specification of Lobster200Z300S-T0X5-V Wafer Robot
| Model | Lobster200Z300S-T0X5-V | |
| Type | One-armed | |
| Applied Specification | ~300 | |
| Rated Payload | 0.5KG | |
| Degree of Freedom | 3 | |
| Range of Motion | Lifting Axis (Z) | 300mm |
| Rotating Axis (T) | 340deg | |
| Stretching Axis (R) | 400mm | |
| Maximum Speed | Lifting Axis (Z) | 300mm/s |
| Rotating Axis (T) | 400deg/sec | |
| Stretching Axis (R) | 700mm/s | |
| Features | 1) Vacuum environment. 2) Robotic Arm Length: 200mm. 3) Direct drive, compact structure 4) Mapping Sensor to detect if wafers are there, if overlying or tilting. 5) Specifications can be customized according to requirements. | |
| Re-positioning Accuracy | ±0.1mm | |
| Leak Rate | 1*10E-6 Pa | |
| Cleanliness | ISO Class1 | |
| Interface | I/O interface | 4 configurable digital inputs; 4 configurable digital outputs; 8 general digital inputs; 8 general digital outputs; (Re-extensible 8 digital inputs/outputs). |
| Ethernet | 1 | |
| USB | 2 | |
| RS232/RS485 | 1 | |
| Communication Protocol | Modbus-RTU/TCP、Socket | |
| Arm Length (R) | 200mm | |
| Vertical Stroke (Z) | 150mm | |
| Machine Table Height (H) | 868mm | |
| Actuator Length (L) | Demand-based | |
| Height from Table to Strokes Down Position (H) | 120mm | |
Robot
Wafer Handling Robot
Wafer Robot
Lobster200Z300S-T0X5-V Wafer Robot
Lobster200Z300S-T0X5-V
Robot Phoneix
Robot Phoenix Wafer Robot
Robot Phoenix Lobster200Z300S-T0X5-V Wafer Robot
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