Robot Phoenix Lobster200Z300S-T0X5-C Wafer Robot
Lobster series 200Z300S-T0X5 wafer handling robot is a single-armed wafer transfer robot with a rate payload of 0.5kg. It has extremely high accuracy, flexibility and safety.
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Features of Lobster200Z300S-T0X5-C Wafer Robot
- Single-armed;
- Payload is 0.5kg;
- 3-degrees-of-freedom;
- Repositioning accuracy reaches ±0.1mm;
- Cleanliness reaches Class100.
Specification of Lobster200Z300S-T0X5-C Wafer Robot
| Model | Lobster200Z300S-T0X5-C | |
| Type | One-armed | |
| Applied Specification | ~300 | |
| Rated Payload | 0.5KG | |
| Degree of Freedom | 3 | |
| Range of Motion | Lifting Axis (Z) | 300mm |
| Rotating Axis (T) | 340deg | |
| Stretching Axis (R) | 400mm | |
| Maximum Speed | Lifting Axis (Z) | 400mm/s |
| Rotating Axis (T) | 260deg/sec | |
| Stretching Axis (R) | 1700mm/s | |
| Features | 1) Cleanroom environment. 2) Robotic Arm Length: 200mm. 3) The whole axes adopt servo motors to meet the needs of highspeed handling. 4) Mapping Sensor to detect if wafers are there, if overlying or tilting. 5) Specifications can be customized according to requirements. | |
| Re-positioning Accuracy | ±0.1mm | |
| Leak Rate | - | |
| Cleanliness | Class 100 | |
| Interface | I/O interface | 4 configurable digital inputs; 4 configurable digital outputs; 8 general digital inputs; 8 general digital outputs; (Re-extensible 8 digital inputs/outputs). |
| Ethernet | 1 | |
| USB | 2 | |
| RS232/RS485 | 1 | |
| Communication Protocol | Modbus-RTU/TCP、Socket | |
| Arm Length (R) | 200mm | |
| Vertical Stroke (Z) | 300mm | |
| Machine Table Height (H) | 620mm | |
| Actuator Length (L) | Demand-based | |
| Height from Table to Strokes Down Position (H) | 128mm | |
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